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MEMS Airflow Sensor
D6F-10A, -20A, -50A
Compact, intelligent sensor featuring MEMS technology for precision mass airflow measurement
* Precision mass airflow up to 50 slpm * Stable output across full scale * Horizontal mounting feature with *NBR `O' ring option * Compact size 78 (L) x 30 (W) x 30 (H) mm * Low power consumption
* NBR material recommended for all applications including medical and food processing
Application Examples
* Industrial processes * Medical Respirators and Ventilators * MiG and TiG welding systems * Anesthesia Delivery * Mass flow controllers * Scientific / test equipment * Fuel cell controls
Ordering Information
Model D6F-10A5 D6F-20A5 D6F-50A5 D6F-10A6 D6F-20A6 D6F-50A6 D6F-CABLE1 Case Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Thermoplastic resin / Aluminum alloy Applicable Gas Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Air, N2O, O2 Flow Range 0 - 10 LPM 0 - 20 LPM 0 - 50 LPM 0 - 10 LPM 0 - 20 LPM 0 - 50 LPM Notes Built-in orifice, Right-angle Connect Built-in orifice, Right-angle Connect Built-in orifice, Right-angle Connect Built-in orifice, Straight Connect Built-in orifice, Straight Connect Built-in orifice, Straight Connect Optional (recommended)
Rating
Absolute maximum rating Item Power-supply voltage Output voltage VCC VOUT Term 26.4 6 Ratings VDC VDC Unit
MEMS Airflow Sensor
D6F-10A, -20A, -50A
1
Electrical Performance
Recommended operation condition and DC characteristic Item Power-supply voltage Operating temperature Maximum output voltage Minimum output voltage VCC TOPR VOH VOL Term -- -- VCC = 12VDC to 24VDC IOH = 0.5mA VCC = 12VDC to 24VDC IOL = -0.5mA Condition -10 5 0 MIN 10.8 -- -- -- -- TYP 60 5.7 1 MAX 26.4 C VDC VDC Unit VDC
Basic Performance
0 to 50 min. (Normal). L/min (Normal) volumetric flow rate at 0 C, 101 3kPa. Measurement condition: Power-supply voltage 12 0.1VDC, ambient temperature 25 2 C and ambient air humidity 25 to 75% RH.
D6F-10A
Flow Rate L/min (normal) Output Voltage (VDC) 0 1.00 0.12 2 1.75 0.12 4 2.60 0.12 6 3.45 0.12 8 4.25 0.12 10 5.00 0.12
D6F-20A
Flow Rate L/min (normal) Output Voltage (VDC) 0 1.00 0.12 4 1.93 0.12 8 2.87 0.12 12 3.70 0.12 16 4.41 0.12 20 5.00 0.12
D6F-50A
Flow Rate L/min (normal) Output Voltage (VDC) 0 1.00 0.12 10 2.45 0.12 20 3.51 0.12 30 4.20 0.12 40 4.66 0.12 50 5.00 0.12
Characteristics
Degree of Protection Applicable Gas Electrical Connection Output Signal Current Consumption Repeat Accuracy Insulation Resistance Dielectric Strength Withstand Pressure Operating Temperature Operating Humidity Storage Temperature Storage Humidity Weight IP40 Air Connector (3 wire) Analog, 1-5VDC (load resistance 10kohm min) Max 15mA (no load, VCC = 12 to 24 VDC, V SS = GND = 0V, 25 C) +/- 3% FSD max, 25 C 20Mohm min. (500VDC between lead terminals and case) 500VAC, 50/60Hz for 1 minute (leakage current typ. <1mA) between lead terminals 500 kPa -10 to +60 C (with no ice or dew condensation) 85%RH max. (with no ice or dew condensation) -40 to +80 C (with no ice or dew condensation) 85%RH max. (with no ice or dew condensation) About 103 grams
Optional: Versions for N2O and O2 also available. For Ar + CO2, He, and He + O2, please consult factory.
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MEMS Airflow Sensor D6F-10A,
-20A, -50A
Installation: D6F-10A5-000, D6F-20A5-000, D6F-50A5-000
Recommendation for right-angle connection Tighten screw with 0.59Nm or less torque. Use M3 pan head screw. Please seal to INLET and OUTLET with the `O' ring etc. Please install the product as shown below. Recommended `O' ring for sealing inlet and outlet orifice Material: NBR70 (recommended) Example part number: JASO part number: CO 0003 Alternative manufacturers with similar DO and W dimensions may be used
Precautions
1. Avoid use in excessively dirty, wet environments 2. Do not use in the presence of flammable gases (e.g. hydrogen, methane, ethane) and liquefied petroleum gas. In addition, do not use with corrosive gases (e.g. chlorine, sulphur, acids, alkalis, etc.). 3. Install in the direction of the arrow indicated. 4. For best results (optimum accuracy), mount horizontally. 5. Use four suitable M3 screws for mounting. Do not exceed a fixing torque of 0.59 Nm. 6. Do not modify D6F- in any way. 7. Do not place any object in or close to the inlet and outlet orifices. 8. Do not use the sensor in any of the following environments: * a location that receives radiant heat from the sun or apparatus * a place where intense light may radiate down * places where corrosive gas, especially sulphur and ammonia gases are present * where fast changing temperatures occur * locations prone to freezing, high humidity, condensation * places where large magnitudes of vibration or shock could occur 9. Noise countermeasures: VERY IMPORTANT: Take suitable precautions to minimize the effects and potential for induced electrical noise. Install away from apparatus that generates strong high frequencies, surges and spikes. Take particular care to install away from AC power transformers, live mains power lines and high power magnetic circuits. Attach a surge suppressor and a noise filter to the peripheral equipment. 10.Ensure good grounding is achieved by grounding the GND terminal to the peripheral equipment's main ground frame connection and its associated regulated power supply. 11.Do not make a direct solder connection to the integral terminals. It is recommended you use the optional cable `D6F-CABLE1' for attachment and to ensure correct connection. 12.D6F- is a precision component. Keep in original packaging and remove only when ready for installation. Damage may occur if subjected to excessive force (e.g. dropped or kicked). Any item suspected to be damaged should be discarded. 13.Immediately following installation, a qualified person should perform checks to ensure safe, satisfactory operation.
MEMS Airflow Sensor
D6F-10A, -20A, -50A
3
Dimensions: D6F-10A5-000, D6F-20A5-000, D6F-50A5-000
All dimensions are shown in millimeters.
D6F-CABLE1 (Optional)
4
MEMS Airflow Sensor D6F-10A,
-20A, -50A
D6F-10A6-000, D6F-20A6-000, and D6F-50A6-000
MEMS Airflow Sensor
D6F-10A, -20A, -50A
5
Omron Electronic Components, LLC
Terms and Conditions of Sales I. GENERAL 1. Definitions: The words used herein are defined as follows. (a) Terms: These terms and conditions (b) Seller: Omron Electronic Components LLC and its subsidiaries (c) Buyer: The buyer of Products, including any end user in section III through VI (d) Products: Products and/or services of Seller (e) Including: Including without limitation 2. Offer; Acceptance: These Terms are deemed part of all quotations, acknowledgments, invoices, purchase orders and other documents, whether electronic or in writing, relating to the sale of Products by Seller. Seller hereby objects to any Terms proposed in Buyer's purchase order or other documents which are inconsistent with, or in addition to, these Terms. 3. Distributor: Any distributor shall inform its customer of the contents after and including section III of these Terms. II. SALES 1. Prices; Payment: All prices stated are current, subject to change without notice by Seller. 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BUYER SHALL BE SOLELY RESPONSIBLE FOR DETERMINING APPROPRIATENESS OF THE PARTICULAR PRODUCT WITH RESPECT TO THE BUYER'S APPLICATION INCLUDING (A) ELECTRICAL OR ELECTRONIC COMPONENTS, (B) CIRCUITS, (C) SYSTEM ASSEMBLIES, (D) END PRODUCT, (E) SYSTEM, (F) MATERIALS OR SUBSTANCES OR (G) OPERATING ENVIRONMENT. Buyer acknowledges that it alone has determined that the Products will meet their requirements of the intended use in all cases. Buyer must know and observe all prohibitions of use applicable to the Product/s. 2. Use with Attention: The followings are some examples of applications for which particular attention must be given. This is not intended to be an exhaustive list of all possible use of any Product, nor to imply that any use listed may be suitable for any Product: (a) Outdoor use, use involving potential chemical contamination or electrical interference. (b) Use in consumer Products or any use in significant quantities.
(c) Energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement machines, vehicles, safety equipment, and installations subject to separate industry or government regulations. (d) Systems, machines, and equipment that could present a risk to life or property. 3. Prohibited Use: NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM. 4. Motorized Vehicle Application: USE OF ANY PRODUCT/S FOR A MOTORIZED VEHICLE APPLICATION MUST BE EXPRESSLY STATED IN THE SPECIFICATION BY SELLER. 5. Programmable Products: Seller shall not be responsible for the Buyer's programming of a programmable Product. IV. WARRANTY AND LIMITATION 1. 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Performance Data: Performance data is provided as a guide in determining suitability and does not constitute a warranty. It may represent the result of Seller's test conditions, and the users must correlate it to actual application requirements. 4. Change In Specifications: Product specifications and description may be changed at any time based on improvements or other reasons. It is Seller's practice to change part numbers when published ratings or features are changed, or when significant engineering changes are made. However, some specifications of the Product may be changed without any notice. 5. Errors And Omissions: The information on Seller's website or in other documentation has been carefully checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical or proofreading errors or omissions. 6. 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Severability: If any provision hereof is rendered ineffective or invalid, such provision shall not invalidate any other provision.
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MEMS Airflow Sensor D6F-10A,
-20A, -50A
Certain Precautions on Specifications and Use
1. Suitability for Use. Seller shall not be responsible for conformity with any standards, codes or regulations which apply to the combination of the Product in Buyer's application or use of the Product. At Buyer's request, Seller will provide applicable third party certification documents identifying ratings and limitations of use which apply to the Product. This information by itself is not sufficient for a complete determination of the suitability of the Product in combination with the end product, machine, system, or other application or use. Buyer shall be solely responsible for determining appropriateness of the particular Product with respect to Buyer's application, product or system. Buyer shall take application responsibility in all cases but the following is a nonexhaustive list of applications for which particular attention must be given: (i) Outdoor use, uses involving potential chemical contamination or electrical interference, or conditions or uses not described in this document. (ii) Energy control systems, combustion systems, railroad systems, aviation systems, medical equipment, amusement machines, vehicles, safety equipment, and installations subject to separate industry or government regulations. (iii) Use in consumer products or any use in significant quantities. (iv) Systems, machines and equipment that could present a risk to life or property. Please know and observe all prohibitions of use applicable to this product. NEVER USE THE PRODUCT FOR AN APPLICATION INVOLVING SERIOUS RISK TO LIFE OR PROPERTY WITHOUT ENSURING THAT THE SYSTEM AS A WHOLE HAS BEEN DESIGNED TO ADDRESS THE RISKS, AND THAT THE OMRON PRODUCT IS PROPERLY RATED AND INSTALLED FOR THE INTENDED USE WITHIN THE OVERALL EQUIPMENT OR SYSTEM. 2. Programmable Products. Seller shall not be responsible for the user's programming of a programmable product, or any consequence thereof. 3. Performance Data. Performance data given in this publication is provided as a guide for the user in determining suitability and does not constitute a warranty. It may represent the result of Seller's test conditions, and the users must correlate it to actual application requirements. Actual performance is subject to Seller's Warranty and Limitations of Liability. 4. Change in Specifications. Product specifications and accessories may be changed at any time based on improvements and other reasons. It is our practice to change part numbers when published ratings or features are changed, or when significant construction changes are made. However, some specifications of the Product may be changed without any notice. When in doubt, special part numbers may be assigned to fix or establish key specifications for your application. Please consult with your Seller representative at any time to confirm actual specifications of purchased Product. 5. Errors and Omissions. The information in this publication has been carefully checked and is believed to be accurate; however, no responsibility is assumed for clerical, typographical or proofreading errors, or omissions. 6. RoHS Compliance. Where indicated, our products currently comply, to the best of our knowledge as of the date of this publication, with the requirements of the European Union's Directive on the Restriction of certain Hazardous Substances ("RoHS"), although the requirements of RoHS do not take effect until July 2006. These requirements may be subject to change. Please consult our website for current information.
MEMS Airflow Sensor
D6F-10A, -20A, -50A
7
Complete "Terms and Conditions of Sale" for product purchase and use are on Omron's website at http://www.components.omron.com - under the "About Us" tab, in the Legal Matters section. ALL DIMENSIONS SHOWN ARE IN MILLIMETERS.
To convert millimeters into inches, multiply by 0.03937. To convert grams into ounces, multiply by 0.03527.
OMRON ELECTRONIC COMPONENTS LLC
55 E. Commerce Drive, Suite B Schaumburg, IL 60173
OMRON ON-LINE
Global - http://www.omron.com USA - http://www.components.omron.com
847-882-2288
Cat. No. J01C-E-01 01/07 Specifications subject to change without notice Printed in USA
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MEMS Airflow Sensor D6F-10A,
-20A, -50A

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