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C08E 0.8m 5/20V CMOS Process Full integration of 5V and 20V mixed signal CMOS on the same die serves sophisticated applications such as EL displays, CCD drivers, and motor controls C08E Overview 0.8m 5/20V CMOS process allowing integration of 5V CMOS with 20V CMOS--can operate with 20V on both gate and drain. Quadruple well Dual-gate oxide Double poly Two or three layer metal process P-type epitaxy over p+ substrate. Features Full integration of 5V and 20V CMOS on the same die Tpd@5V = 200pS; Tpd@20V = 500pS CMOS with 20V on gate and drain Single and double drain extensions on 20V NMOS and 20V PMOS 20V double poly capacitor High Value (10k:/sq) and Low TCR poly resistor options Mixed signal Cadence Foundry Design Kit (FDK) available Applications EL displays CCD Drivers Motor Control Instrumentation Layout Rules Layer Poly 1 Poly2 Contact Metal 1 Via Metal 2 Via 2 Metal 3 Width (m) 0.8 1.0 0.9x0.9 1.1 1.0x1.0 1.2 2.0x2.0 3.0 Space (m) 0.9 1.2 0.8 1.0 1.0x1.0 1.1 2.0 2.4 Mixed Signal Capabilities 20V double poly capacitor (0.84fF/m ) High value poly resistor option (10k:/sq) 5V 0.8m CMOS--1.8k gates/mm2 20V CMOS with single and double extensions Isolated vertical npn (E=70) 2 Simplified Cross-Section of 20V CMOS 2 0 V N M O S (lo w s id e ) B S n+ 2 0 V P M O S (lo w sid e ) D B n+ G N -E xt S p+ P-B a se G D p+ P-B a se p+ 26-Sep-02 03-70-00145-00 www.dalsasemi.com P-W e ll n+ H V N -W e ll p -e p ita xy p -e p ita xy 1 DALSA Semiconductor * C08E 5/20V CMOS Process C08E 0.8m 5/20V CMOS Process Electrical Parameters of Representative Transistors Parameter W x L (Pm) VT (V) Ids (mA) Bvdss (V) Isub (PA/Pm) RON (:) 5V NMOS 50 x 0.8 0.65 19 12 0.85 86 5V PMOS 50 x 0.8 -0.65 9 12 256 20V NMOS 50 x 6 0.9 12 33 1.0 475 20V PMOS 50 x 3 -0.9 15 28 505 Single and Double Extended 20V Ring Oscillators 1500 1250 1000 tpd (pS) 750 500 250 5 10 15 Vdd (V) 20 25 Single Ext Double Ext Single Extended 20V PMOS (L=3m, W=50m) Single Extended 20V NMOS (L=6m, W=50m) For More Information DALSA Semiconductor 18 Blvd de l'aeroport Bromont Quebec Canada J2L 1S7 26-Sep-02 03-70-00146-00 www.dalsasemi.com Tel : +01 800 718 9701 Fax : +01 450 534 3201 e-mail: sales@dalsasemi.com www.dalsasemi.com |
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