mpxm2051g rev 1, 09/2005 freescale semiconductor technical data ? freescale semiconductor, in c., 2005. all rights reserved. 50 kpa on-chip temperature compensated and calibrated silicon pressure sensors the mpxm2051g device is a silicon piezor esistive pressure sensor providing a highly accurate and linear voltage output - directly proportional to the applied pressure. the sensor is a single, mono lithic silicon diaphragm with the strain gauge and a thin-film resistor network integrated on-chip. the chip is laser trimmed for precise span and offset ca libration and temperature compensation. features ? temperature compensated over 0 c to +85 c ? available in easy-to-use tape & reel ? ratiometric to supply voltage ? gauge ported typical applications ? pump/motor controllers ? robotics ? level indicators ? medical diagnostics ? pressure switching ? non-invasive blood pressure measurement figure 1 shows a block diagram of the internal circ uitry on the stand-alone pressure sensor chip. ordering information device type options case no. mpx series order no. packing options device marking ported absolute, axial port 1320a mpxm2051gs rails mpxm2051g absolute, element only 1320a MPXM2051GST1 tape & reel mpxm2051g mpxm2051g series compensated and calibrated pressure sensor 0 to 50 kpa (0 to 7.25 psi) 40 mv full scale span (typical) mpxm2051gs/gst1 case 1320a-02 pin number 1 gnd 3 v s 2 +v out 4 -v out mpak packages v s 3 x-ducer sensing element thin film temperature compensation and calibration 2 4 v out+ v out- 1 gnd figure 1. temperature compensated pressure sensor schematic
mpxm2051g sensors 2 freescale semiconductor voltage output versus applied differential pressure the differential voltage output of the sensor is directly proportional to the differential pressure applied. the output voltage of the diff erential or gauge sensor increases with increasing pressure applied to the pressure side relative to the vacuum si de. similarly, output voltage increases as increasing vacuum is applied to the vacuum side relative to the pressure side. table 1. maximum ratings (1) 1. exposure beyond the specified limits may caus e permanent damage or degradation to the device. rating symbol value unit maximum pressure p max 200 kpa storage temperature t stg -40 to +125 c operating temperature t a -40 to +125 c table 2. operating characteristics (v s = 10 vdc, t a = 25 c.) characteristic symbol min typ max unit pressure range (1) 1. 1.0 kpa (kilopascal) equals 0.145 psi. p op 0?50kpa supply voltage (2) 2. device is ratiometric within this sp ecified excitation range. oper ating the device above the s pecified excitation range may i nduce additional error due to device self-heating. v s ?1016vdc supply current i o ?6.0?madc full scale span (3) 3. full scale span (v fss ) is defined as the algebraic difference between the output vo ltage at full rated pressure and the output voltage at the minimum rated pressure. v fss 38.5 40 41.5 mv offset (4) 4. offset (v off ) is defined as the output voltage at the minimum rated pressure. v off -1.0 ? 1.0 mv sensitivity ? v/ ? p? 0.8 ?mv/kpa linearity (5) ? -0.3 ? 0.3 %v fss pressure hysteresis (5) (0 to 50 kpa) 5. accuracy (error budget) consists of the following: ? linearity: output deviation from a straight line relationship with pressure, using end point method, over the specified pressure range. ? emperature hysteresis: output deviation at any temperature within the operating temperature range, after the temperature is cycl ed to and from the minimum or maximum operating temperatur e points, with zero differential pressure applied. ? pressure hysteresis: output deviation at any pressure within t he specified range, when this pressure is cycled to and from the minimum or maximum rated pressure, at 25 c. ? tcspan: output deviation at full rated pressure over the temperature range of 0 to 85 c, relative to 25 c. ? tcoffset: output deviation with minimum rated pressu re applied, over the temperature range of 0 to 85 c, relative to 25 c. ?? 0.1 ? %v fss temperature hysteresis (5) (-40 c to +125 c) ?? 0.5 ? %v fss temperature effect on full scale span (5) tcv fss -1.0 ? 1.0 %v fss temperature effect on offset (5) tcv off -1.0 ? 1.0 mv input impedance z in 1000 ? 2500 ? output impedance z out 1400 ? 3000 ? response time (6) (10% to 90%) 6. response time is defined as the time for the incremental change in the output to go from 10% to 90% of its final value when s ubjected to a specified step change in pressure. t r ?1.0?ms warm-up ? ? 20 ? ms offset stability (7) 7. offset stability is the product's output deviation when subjected to 1000 hours of pu lsed pressure, temperature cycling with bias test. ?? 0.5 ? %v fss
mpxm2051g sensors freescale semiconductor 3 linearity linearity refers to how well a transducer's output follows the equation: v out = v off + sensitivity x p over the operating pressure range. there are two basic methods for calculating nonlinearity: (1) end point straight line fit (see figure 2 ) or (2) a least squares best line fit. while a least squares fit gives the ?best case? linearity error (lower numerical value), the calculations required are burdensome. conversely, an end point fit will give the ?worst case? error (often more desirable in error budget calculations) and the calculations are more straightforward for the user. the specified pressure sensor lin earities are based on the end point straight line method measured at the midrange pressure. figure 2. linearity specification comparison on-chip temperature compensation and calibration figure 3 shows the minimum, maxi mum and typical output characteristics of the mpxm2051g series at 25 c. the output is directly proportional to the differential pressure and is essentially a straight line. a silicone gel isolates the die surface and wire bonds from the environment, while allowing the pressure signal to be transmitted to the silicon diaphragm. figure 3. output versus pressure differential relative voltage output pressure (% fullscale) 0 50 100 end point straight line fit exaggerated performance curve least squares fit straight line deviation offset least square deviation output (mvdc) kpa psi 40 35 30 25 15 10 5 0 -5 0 12.5 1.8 25 3.6 37.5 5.4 50 7.25 20 max typ min offset (typ) span range (typ) v s = 10 vdc t a = 25 c
mpxm2051g sensors 4 freescale semiconductor package dimensions case 1320a-02 issue a pin 4 pin 1 page 1 of 2
mpxm2051g sensors freescale semiconductor 5 package dimensions case 1320a-02 issue a page 2 of 2
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