gas and liquid flow sensor module fs1012 datasheet ? 2017 integrated device technology, inc . 1 july 20 , 2017 description the fs1012 mems mass flow sensor module measures the flow rate using the thermo - transfer (calorimetric) principle. the fs1012 is capable of measuring a gas or liquid medium. the fs1012 offers key advantages over resistor - based flow solutions. the sensor utilizes thermopile sensing, which provides an excellent signal - to - noise ratio. the sensor comprise s a solid thermal isolation technology and silicon - carbide coating to prot ect it from abrasive wear and provides robustness and long - term reliability. in comparison, other sensors typically contain a fragile membrane above an etched cavity for the thermal isolation base. the fs1012 features the sensor fully assembled and wire - bo nded out to a 6 - p in header. typical applications ? process controls and monitoring ? oil and gas leak detection ? hvac and air control systems ? cpap and respiratory devices ? automotive mas air flow meter ? liquid dispensing system basic application circuits figure 1 . single - ended circuit example feature s ? gas or liquid mediums ? robu st solid isolation technology ? resistant to surface contamination ? n o cavity to cause clogging ? res istant to vibration and pressure shock ? low power application ? sensitive at low flow rates and differential pressure level s ? fas t response: 2 ms ? milliv olt output ? supp ly voltage : 3 v to 5v ? module o perating temperature range: 0c to +8 5c fs1012 flow sensor module figure 2 . differential circuit example h t r 1 h t r 2 + C + m i c r o c o n t r o l l e r / a s i c i n p u t o f f s e t a d j u s t m e n t g a i n : 2 0 x t o 1 0 0 x f l o w s e n s o r g n d 3 v t o 5 v t p 1 + t p 1 C s p i a d c i 2 c p w m o f f s e t C h t r 1 h t r 2 s p i a d c i 2 c p w m + C + C + m i c r o c o n t r o l l e r / a s i c d i f f e r e n t i a l a m p g a i n : 2 0 x t o 1 0 0 x C f l o w s e n s o r g n d 3 v t o 5 v t p 1 + t p 1 C t p 2 + t p 2 C
fs1012 datasheet ? 2017 integrated device technology, inc . 2 july 20 , 2017 pin assignments figure 3 . pin assignments for module C top view pin descriptions table 1 . pin descriptions pin number pad name typ e description 1 tp1+ output thermopile 1 (+) 2 tp1 C output thermopile 1 ( C ) 3 htr1 input heater 4 htr2 input heater 5 tp2 C output thermopile 2 ( C ) 6 tp2+ output thermopile 2 (+) p i n 1 2 3 4 5 6
fs1012 datasheet ? 2017 integrated device technology, inc . 3 july 20 , 2017 absolute maximum ratings the absolute maximum ratings are stress ratings only. stresses greater than those listed below can cause permanent damage to the device. functional operation of the fs1012 at abs olute maximum ratings is not implied. exposure to absolute maximum rating conditions may affect device reliability. table 2 . absolute maximum ratings symbol parameter conditions minimum maximum units v h heater voltage supply 5.6 v t s tor storage t emperature - 50 130 c operating conditions table 3 . recommended operating conditions symbol parameter minimum typical maximum units t amb ambient o perating t emperatur e [a] 0 8 5 c i htr_cc heater driving current C constant curren t [a] 10 20 ma v htr_cv heater driving voltage C constant voltag e [a] 3 5.6 v [a] sensor specifications are tested at the wafer die level. electrical characteristics table 4 . electrical characteristics note: see important notes at the end of the table. symbol parameter conditions minimum typical maximum units r h heater resisto r [a] 230 290 400 ? ? _ htr heater temperature coefficient of resistanc e [a] 300 ppm/c v tp_out thermopile output [a] 3v driving voltage, in air, 20c, no flow 30 35 60 mv r tp thermopile resistanc e [a] 20c 100 210 300 k? v tp_outdiff thermopile differential outpu t [a] 3v driving voltage, in air, 20c, no flow - 1 0 1 mv t resp response tim e 2 ms
fs1012 datasheet ? 2017 integrated device technology, inc . 4 july 20 , 2017 symbol parameter conditions minimum typical maximum units standard gas flow rang e [b] , [c] gas flow fs1012 - 1020 - ng 0 2 (2000) slpm (sccm) fs1012 - 1100 - ng 0 10 (10 000) slpm (sccm) standard liquid flow rang e [b] , [c] liquid flow fs1012 - 1001 - lq 0 0.5 (500) slpm (sccm) fs1012 - 1002 - lq 0 1.0 (1000) slpm (sccm) [a] sensor s pecifications ar e tested at the wafer die level. [b] slpm: standard liter per minute . [c] sccm: standard cubic centimeter per minute.
fs1012 datasheet ? 2017 integrated device technology, inc . 5 july 20 , 2017 mechanical drawings figure 4 . fs1012 module dimensions
fs1012 datasheet ? 2017 integrated device technology, inc . 6 july 20 , 2017 ordering information note: the part code depends on the application. in the part code, ng refers to non - corrosive gas and lq refers to liquid. orderable part number description and package shipping packaging temperature fs1012 - 1020 - ng 0 to 2 slpm g as flow sensor mounted on a circuit board with a flow housing box 0c to +85c fs1012 - 1100 - ng 0 to 10 slpm g as flow sensor mounted on a circuit board with a flow housing box 0c to +85c fs1012 - 1001 - lq 0 to 0.5 slpm (500 sccm) liquid flow sensor mounted on a circuit board with a flow housing box 0c to +85c fs1012 - 1002 - lq 0 to 1.0 slpm (1000 sccm) liquid flow sensor mounted on a circuit board with a flow housing box 0c to +85c revision history revision date description of change july 20 , 2017 initial release of the datasheet. corporate headquarters 6024 silver creek valley road san jose, ca 95138 www.idt.com sales 1 - 800 - 345 - 7015 or 408 - 284 - 8200 fax: 408 - 284 - 2775 www.idt.com/go/sales tech support www.idt.com/go/support disclaimer integrated device technology, inc. (idt) and its affiliated companies (herein referred to as idt) reserve the right to modify the products and/or specifications described herein at any time, without notice, at idt's sole discretion. performance specifications and operati ng parameters of the described products are determined in an independent state and are not guaranteed to perform the same way when installed in customer products. the information contained herein is provided without representation or warranty of a ny kind, whether express or implied, including, but not limited to, the suitability of idt's products for any particular purpose, an implied warranty of merchantability, or non - infringement of the intellectual property rights of others. this document is presented o nly as a guide and does not convey any license under intellectual property rights of idt or any third parties. idt's products are not intended for use in applications involving extreme environmental conditions or in life support systems or similar devices where the failure or malfunction of an idt product can be reasonably expected to significantly affect the health or safety of users. anyone using an idt product in such a manner does so at their own risk, absent an express, written agreement by idt. integrated device technology, idt and the idt logo are trademarks or registered trademarks of idt and its subsidiaries in the united states and other countries. other trademarks used herein are the property of idt or their respective third party owners. fo r datasheet type definitions and a glossary of common terms, visit www.idt.com/go/glossary . all contents of this document are copyright of integrated device technology, inc. all rights reserved.
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