pressure sensor die p1602 features ? solid state, high reliability ? low-cost , miniature size ? standard pressure ranges: 0 to 15, 0 to 30, 0 to 50, ? 0 to 100 psia (1, 2.1, 3.4 and 6.9 bar) ? nonlinearity < 0.2 %fso ? senstable?, silicon fusion bonded sensor die applications ? consumer: portable tire gauges, altimeters, and barometers ? industrial: pneumatic controls, leak detection, manometers, portable pressure gauges, pressure switches, and controllers ? automotive: tire pressure, diagnostics, engine, and suspension control, map sensors ? medical: patient monitoring and clinical instrumentation description the p1602 piezoresistive pressure sensors are offered in a miniature 0.04 in x 0.04 in (1 mm x 1 mm) die. when ex - cited with 1 ma constant current , the p1602 produces a millivolt output that is proportional to input pressure. the p1602 is available as an absolute pressure sensor, where the applied pressure is referenced to an internal vacuum sealed within the die. with novasensors senstable ? process, the p1602 will provide very low long-term stability errors and excellent repeatability. a mphenol advanced sensors
p1602 specifications parameter value units notes electrical @ 71.6f (22c) unless noted excitation 1.00 ma 10 vdc maximum input impedance 5000 20% output impedance 5000 20% environmental operating temperature -40 to 257 f (-40c to 125c) storage temperature -67 to 302 f (-55c to 150c) (undiced) maximum overpressure 6x rated pressure 2x 3 mechanical weight 0.02 grams xx lb media compatibility clean dry air, non- corrosive gases performance parameters (1) value (6) units notes zero offset 8 mv/v 10 mv/v 2 full-scale (fs) output 65 to 115 mv 2 75 to 125 mv 170 to 280 mv 3 linearity 0.2 %fso 4 0.25 %fso 3, 4 pressure hysteresis 0.1 %fso temperature coeffcient of zero 30 v/v/c 5 temperature coeffcient of resistance 0.3 % /c 5 temperature coeffcient of sensitivity -0.2 %/c 5 thermal hysteresis of zero 0.1 %fso 6 long term stability of fso 0.2 %fso 7 1. values measured at 1.0 ma and 71.6f (22c) unless noted. 2. 100 kpa pressure range. 3. 4295 psia (296.12 bar) pressure range. 4. best ft straight line. 5. between 32f and 158f (0c and 70c). temperature coeffcients are typical values. 6. between 32f and 158f (0c and 70c). 7. typical over one year. shipping and handling wafers are shipped in protective plastic containers. the wafers are sawn on sticky tape with rings. all sensor wafers are electrically probed, visually inspected. all rejects are marked by an ink dot. each wafer will be labeled with the lot number, wafer number, device num - ber, and the number of available sensor die. warranty novasensor warrants its products against defects in material and workmanship for 12 months from the date of shipment. products not subjected to misuse will be repaired or replaced. novasensor reserves the right to make changes without further notice to any products herein. novasensor makes no warranty, representation or guarantee regarding the suitability of its products for any particular application. novasensor does not assume any liability arising out of the application or use of any product or circuit and specifcally dis - claims, and all liability, without limitation consequential or incidental damages. the foregoing warranties are exclusive and in lieu of all other warranties, whether written, oral, implied or statutory. no im - plied statutory warranty of merchantabilility or ftness for particular purpose shall apply. aas-920-265b-08/2014 www.amphenol-sensors.com ? 2014 amphenol corporation. all rights reserved. specifcations are subject to change without notice. other company names and product names used in this document are the registered trademarks or trademarks of their respective owners. a mphenol advanced sensors die dimensions (w x h x d): 0.04 in x 0.04 in x 0.02 in (1 mm x 1 mm x 0.6 mm) p1602 schematic and dimensions ordering information minimum release quantity: 2 wafers per pressure range or approximately 10,000 sensor die. part number description 51393 15 psia (1 bar); 100 kpaa 51394 30 psia (2.06 bar); 200 kpaa 51395 50 psia (3.44 bar); 350 kpaa 51397 100 psia (6.89 bar); 700 kpaa 51399 150 psia (10.34 bar); 1035 kpaa 51406 300 psia (20.68 bar); 2070 kpaa 51407 500 psia (34.47 bar); 3450 kpaa 51408 1000 psia (68.94 bar); 6895 kpaa 51421 2500 psia (172.36 bar); 17,240 kpaa 51409 4295 psia (296.12 bar); 30,000 kpaa pad dimensions (w x h): 0.005 in x 0.005 in (0.13 mm x 0.13 mm)
|
